Metallographic Tool-Makers microscope For Wafer Measuring & Observation

• Customization: Available
• After-sales Service: Online Training
• Warranty: 12 months
• Model NO.: MMC300
• Magnification: >1000X
• Type: Metallographic
• Number of Cylinder: ≥Three
• Mobility: Desktop
• view type: bright field & dark field
• focus style: auto-focus
• XYZ travel range: 300*200*150mm
• XYZ axis resolution: 0.1um
• Eyepiece: WF 10X/22
• Light source: Led
• Metallographic objective Lens: 5X 10X 20X 50X
• XY axis accuracy: 2.0+L/200um
• Z axis accuracy: 1.5+L/200um
• Camera: 1.3M digital color CCD (1920*1080)
• Transport Package: wooden case packaging
• Specification: 300*200 400*300
• Origin: China
• HS Code: 90118000
• Production Capacity: 1000 sets/year

Product Description

Features
Z axis with motor , electric move

Upright colume and base adopt cast aluminum

High accuracy measure & high resolution observe

SOPTOP company CSIC infinity correction optical system ,or optional Nikon latest CFI60 optics

Technical Parameter

Model	MMC-300
Table travel range(XYZ)	300*200*150mm
Dimension	385*785*725mm
Machine weight	80kg
Resolution	0.0001mm
XY axis Accuracy	≤2.0+L/250um
Z axis accuracy	≤1.5+L/50um( under 50X)
X.Y move style	Manual
Z move style	Automatic+ Manual pulse focus(min move distance 0.3um)
Work-table loading	25kg
Illuminating system	Cold light source transmission lighting, 10W LED reflection lighting
Nosepiece	Five-hole objective rotary table (with DIC slot)
Optical eyepiece tube	Trinocular tube
Eyepiece	WF 10X/22
Adaptor lens	0.5X
Metallographic objective Lens (Bright filed )	LWDPLAN 5X:        (N.A) 0.14,    working distance :10.8mm
	LWDPLAN 10X:      (N.A) 0.25,    working distance:10.0mm
	LWDPLAN 20X:      (N.A) 0.40,    working distance: 4.0 mm
	LWDPLAN 50X:      (N.A)0.55,    working distance: 7.5 mm
Optical system	CSIC infinity correction optical system
Power	220V±10% ,50Hz , 0.5KW
Environment require	temperature range:22±2ºC,humidity range:30%-70%
Optional parts	100X lens, Dark-field, polarized, DIC(differential interference contrast)

INSPEC-M software

system with three axis motion state optimization control and mechanical geometric error compensation function; optimization Settings and system software control system self-check function;

  perfect intuitive graphical interface software for different application level of the operator provides a convenient executive function;

  have programming function, suitable for the measurement of mass detection;

  coordinate system to management function: the establishment of the workpiece coordinate system, transformation, access functions.

  Automatic edge functions: automatic capture edge can be set boundaries, a multipoint line, circle, arc, etc. Reduce the visual measurement error.

 box detection range: choose box range measurement multiple figures at the same time, greatly reduce the workload

   screen of burrs automatic edge measurement: in view of the blind hole, chamfering, irregular graphics, flash products edge processing, make its       edge take more hasten is perfect

DXF contrast measurement: directly to the workpiece compared with measured workpiece design drawings

Geometry elements of evaluation:

  Basic geometry elements measurement and evaluation: point, line, plane, circle, ellipse, cylinder, cone Relationship calculation of basic geometry:     intersection, distance, symmetry, vertical and Angle Evaluation of shape error: straightness, flatness, roundness and cylindricity
The evaluation of the error of position: parallelism, perpendicularity, inclination, coaxial degree (concentricity), symmetry Degree, degree of position

the unification of the workpiece coordinate and machine coordinate system.

with parts model automatic knowledge take geometrical element characteristic function and automatic generation of test procedures.

with functions of reverse engineering measurement.

report output: product measurement result documents can go directly to EXCEL and make the results be clear at a glance
SPC statistical analysis: can calculate, CA CP and CPK, DRL, DRR, DR, MAX, MIN, AVG, RANGE, STD, and you can draw X - R diagram, and line charts, histograms, etc.