Customization: | Available |
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Travel (X*Y*Z)mm: | 250X150X200, 300X200X200, 400X300X200 |
resolution: | 0.5 micron |
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Model No. |
JYS 320 | ||
Rotating platform |
Rotation accuracy |
Radial direction |
±(0.03um+6H/10000)µm H (mm) ±(0.03um+6H/10,000)µm, where H: Measured height (mm) |
Axial direction |
±(0.03um+4X/10000)µm X (mm) ±(0.03um+4X/10,000)µm, where X: Distance to the center of rotation (mm) |
||
Effective diameter of workstage |
220mm | ||
Centering/leveling adjustment range |
±2mm ; ±1.5° Yaw/deflection/run-out: ±2mm; Pitch: ±1.5° |
||
Max. measuring diameter |
580mm | ||
Workstage max. load capacity |
100kg | ||
Column section |
Straightness of movement |
0.7μm/100mm(λc2.5) 0.7μm/100mm (μm/100mm(λc2.5) |
|
Parallelism with turret |
0.8μm/100mm | ||
Max. measuring height |
300mm | ||
Max. measuring depth |
φ32mmX170mm() φ32mm X 170mm (standard measuring needle) |
||
Measuring speed |
0.1-2mm/s | ||
Beam section |
Straightness of beam |
0.5μm/100mm(λc2.5) 0.5μm/100mm (μm/100mm(λc2.5) |
|
Max. measuring range |
200mm | ||
Measuring speed |
0.1-2mm/s | ||
Sensor |
Measuring range |
±500µm | |
Measuring force |
70 - 100mN | ||
Measuring direction |
() Bi-directional (manual commutation) |
||
Angle adjustment of measuring needle |
±45° | ||
Contact mode of measuring needle |
Automatic contact parts |
||
Collection and control |
System transmission mode |
PCI | |
System resolution |
16AD 16-bit AD |
||
Number of acquisition points on the circumference |
8192/ 8,192 points/rotation |
||
Acquisition interval on the column |
1μm | ||
Acquisition interval on the guide rail |
1μm | ||
Others |
Air pressure |
0.41Mpa | |
Gas consumption |
30L/min | ||
Power supply |
220V AC,50Hz 220V AC, 50Hz |
||
Computer system |
() Standard Configuration (or ben be optional) |
||
Output |
A4 Standard configuration: A4printer |
||
Precision chuck |
Standard configuration |